GO TipTilt HV
GO TipTilt HV
The GO TipTilt High Vacuum stage moves loads of up to 2,5 kg with nanometer precision along the Z-axis, as well as around the X-axis and the Y-axis in vaccum surrounding.
All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering Smooth Continuous Motion, Fast Step & Settling Times and that are Self-Locking at Rest.
| Positioning | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N | |
|---|---|---|---|
| Travel (Z) | +-10 mm | ||
| Minimum Incremental Motion (Z) | 2 nm | ||
| Minimum Incremental Motion Θ(X, Y) | < 0,1 µrad | ||
| Repeatability (Z) | +- 200 nm | ||
| Repeatability Θ(Z) | +- 15 µrad | ||
| Motion | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N | |
| Maximum Operating Force (Push/Pull) | (Z) 15 N (min.) | (Z) 30 N (min.) | |
| Holding Force (When Power Is Off) | (Z) 18 N (min.) | (Z) 33 N (min.) | |
| Maximum Speed At No Load (Z) | 8 mm/s | ||
| Maximum Speed With Max Load On Top Plate (Z) | 5 mm/s (min.) | 1 mm/s (min.) | |
| Drive Type | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N | |
| Base Module | PRECIBEO GO Linear Stage 4545 | ||
| Mechanical | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N | |
| Maximum Load Centered on Top | 1 kg | 2,5 kg | |
| Diameter | 150 mm | ||
| Height | 92 mm | ||
| Miscellaneous | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N | |
| Vacuum Side Cables | 3 pcs of 1 m cable (+-5%) with f. D9SUB connector | ||
| Air Side Cables | 3 pcs of 2 m cable (+-5%) with f. D9SUB & ix Industrial™ connectors | ||
| Material | Aluminum | ||
Related Products
GO XYR
The PRECIBEO GO XYR stage moves loads of up to 10 kg with nanometer precision along the X- and Y-axis, as well as around the Z-axis.